Equipment

Microsystems Technology

Design tools

Coating/Microstructuring

complete photolithography with resist processor and double-sided mask aligner for microstructuring
dry etching (RIE) of silicon wafers as well as for plastic substrates
process equipment for anisotropic etching of silicon
thin film process plant (sputtering, PECVD)
Parylene C coater
imidization of polyimide
laser for drilling and cutting (e. g. silicon or aluminium oxide ceramics)
laboratory for replication technologies (silicone moulding, mould manufacturing)
3D rapid prototyping by means of 3D printer and 3D scanner
laboratory for the processing and manufacturing of silicon structures, including the targeted optimization of their properties through biological functionalization of surfaces and the introduction of special fillers

Assembly and packaging technologies

Foil-based Microsystems Technology

hot embossing equipment
equipment for rotative hot embossing of large area foils (reel to reel)
equipment for rotative printing of proteins and structures of graphene (reel to reel)
foil laminator

Measurement Technology/Analysis

Biotelemetry/Electronics/Software and Firmware

telemetry lab equipped with instrumentation for professional electronics development and measurement e. g. digital HF oscilloscopes, programmable power supply untis, spectrum analyzers, precision multimeters, etc.
design tools for the development of electronic circuits (OrCAD, Mentor Graphics, Solid Works)
development and production of distributed sensors and actuators, including systems for the physiological measurement technology and electrostimulation
development tools for the programming of 8, 16 and 32-bit microcontrollers and FPGAs
software laboratory
simulation tools for simulation of electromagnetic systems
VR/AR components, e .g. HoloLEns
Test Stands for Characterization of Active Implants
test stands for detecting the effect of tissue on wireless communication and wireless energy transmission
neurophysiological test stands
setup of special test stands
EMC test stand

Methodology

laboratory for development and application of devices and methods of clinical neurophysiology including eye-tracking and thermography
drive simulator for evaluation of driving behaviour and condition of the driver using dynamically acquired vital parameters
3D measurement station for acquisition and evaluation of motion sequences including 16-channel recording of EMG with wireless transmission
microcontroller development stations
development environments for wireless-based positioning systems
software development tools for PC and smart phones applications in Java, C/C++/C#; database development tools (Oracle, SQL server, InterSystems Caché)
devices and communication facilities for wireless, continuous patient monitoring
servers and databases
cryptographic applications

Biomedical Engineering